Description
At-A-Glance Executive Brief
- Model: 4104C (ZYGO ZMI)
- Brand: ZYGO
- Part Type: 6U VME64x four-axis laser interferometer measurement board
- Lifecycle status: EOL legacy semiconductor metrology critical spare; stocked for brownfield lithography, wafer inspection and precision motion platform cabinet maintenance
- System compatibility: ZYGO ZMI laser metrology system; paired with ZYGO He-Ne laser source, processes optical interferometer signals and delivers high-speed sub-nanometer real-time position feedback for multi-axis precision motion stages
- Weight: ~0.68 kg
Technical Introduction
Failure of ZYGO 4104C measurement board terminates all four axes of laser interferometer position reading. The precision motion stage loses closed-loop position feedback, causing positioning drift, stage runaway risk, wafer misalignment and lithography exposure defects. This triggers equipment interlock trips, wafer scrap and unplanned downtime for semiconductor manufacturing tools.
ZYGO ZMI 4104C is a 6U VME64x form factor multi-axis interferometer signal processing card for high-precision optical metrology. It supports four independent measurement axes, converting laser interferometer optical signals into digital position data with sub-nanometer resolution. The board integrates native cyclic error compensation algorithm to suppress interferometer non-linearity errors. Multiple 4104C cards can be installed in one VME chassis to expand measurement axes up to 64 axes. Widely deployed on semiconductor lithography machines, wafer scanners, optical inspection tools and ultra-precision machining motion platforms. Semiconductor fab reliability teams stock 4104C to restore high accuracy position metrology for legacy ZYGO ZMI laser measurement systems.
- Best Suited For
- ZYGO ZMI laser metrology VME chassis in semiconductor lithography & wafer inspection tools
- 4-axis sub-nanometer displacement measurement, real-time position feedback for precision motion stages
- Direct drop-in replacement for existing ZYGO ZMI 4104C VME laser interferometer measurement hardware
Core Technical Specifications
| Parameter | Value |
|---|---|
| Part Number | 4104C (ZYGO ZMI) |
| Manufacturer | ZYGO |
| Product Type | 4-Axis Laser Interferometer Measurement Board |
| Form Factor | 6U VME64x |
| Number of Axes | 4 independent measurement axes |
| Position Resolution | Sub-nanometer level |
| Function | Interferometer signal conversion, cyclic error compensation, real-time position output |
| Communication Bus | VME64x backplane bus |
| Power Supply | 5V / ±12V VME bus power |
| Local Indicators | Front panel LED for power, signal and fault diagnostics |
| Operating Temperature | 0℃ ~ +55℃ |
| Humidity | 5–85% RH non-condensing |
| Weight | ~0.68 kg |
| Environmental Details | Please refer to ZYGO ZMI hardware manual for full EMC, shock and vibration specifications for semiconductor cleanroom environments. |
Field Engineer’s Tech Notes
- Confirm full part revision, VME chassis firmware, laser head matching and axis configuration before replacement; firmware mismatch or incompatible laser source will result in loss of position measurement or large reading errors.
- Implement machine safety interlock bypass and lockout-tagout for the precision motion stage before removing the VME board. Loss of position feedback may cause uncontrolled stage movement.
- Inspect VME backplane connectors, laser fiber cables, optical heads and VME chassis cooling fans; contaminated optical paths, loose VME connectors and insufficient cooling are common causes of intermittent measurement faults.
- After installation, verify VME power-up, board initialization, laser signal acquisition and per-axis position reading calibration. Test closed-loop stage positioning performance, clear faults and remove safety bypass before returning the semiconductor tool online.
- ESD protection required while handling PCB assembly. Strict cleanroom handling procedure is mandatory for optical metrology components.
- Perform laser optical path inspection and axis calibration during semiconductor tool preventative maintenance.
Adaptive QA & Testing Protocol
Each ZYGO 4104C measurement board is bench tested on ZYGO ZMI VME test chassis. We verify VME power boot, board recognition, four-axis interferometer signal acquisition, position reading stability and diagnostic LED operation. PCB, edge connector and solder joints are visually inspected for burn marks, corrosion or thermal damage. Full test reports are available upon request.
Buyer’s FAQ
Q: What is ZYGO 4104C used for? A: It is a 4-axis VME64x laser interferometer measurement board, used with ZYGO ZMI laser systems to provide sub-nanometer position feedback for precision motion stages in semiconductor lithography and wafer inspection equipment.
Q: What warranty applies for refurbished and NSFP 4104C? A: Refurbished and NSFP units carry a 12-month hardware warranty. Coverage excludes ESD damage, optical contamination, firmware/configuration mismatch, VME backplane faults and improper safety bypass.
Q: What lead time should I expect? A: Stocked units ship 3–7 business days. If inventory depleted, we source surplus ZYGO 4104C metrology boards.
Q: Can 4104C be hot swapped? A: Not hot-swappable. VME chassis power must be fully isolated before removal. Motion stage safety interlocks require safety bypass before replacement.
Q: Is 4104C still in production? A: No, ZYGO ZMI 4104C is end-of-life legacy semiconductor metrology hardware.
Start Chat
Send an Email
