Description
Advanced Energy APEX3013 | 3 kW, 13.56 MHz RF Power Generator, Semiconductor Plasma Processing Equipment Spare Part, In Stock
Model: APEX3013
Brand: Advanced Energy (AE)
Product Type: RF Power Generator
Product Series: APEX
Output Power: 3000 W
Output Frequency: 13.56 MHz
Cooling: Water cooling
Application: Semiconductor manufacturing, plasma etching, PECVD, PVD, and industrial plasma processing
Product Overview
The Advanced Energy APEX3013 is a radio-frequency (RF) power generator designed to deliver high-frequency power for plasma processing applications. Operating at 13.56 MHz with a nominal output power of 3000 W, it is used in semiconductor manufacturing and other industrial processes that require controlled RF energy.
The APEX series supports plasma processes such as plasma etching, plasma-enhanced chemical vapor deposition (PECVD), and physical vapor deposition (PVD). Water cooling is used in the product family to support thermal management during operation.
The APEX3013 is suitable for maintenance, replacement, and spare-parts inventory for compatible semiconductor processing equipment. Before ordering, verify the complete manufacturer part number and equipment configuration, as interface and electrical requirements may vary between versions.
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